Research Of RF-excited Source For RF-excited CO₂ Laser

The RF-excited CO2 laser is widely applied in laser process for its excellent capability. At meantime, some universities and institutes in China have been taking research into it, but no products have been successfully taking into practice. This thesis is focus on the research of RF-excited source for RF-excited CO2 laser.The trend and the key technique of RF-excited CO2 laser are firstly introduced here, and then the factors relevant to the characteristic of RF-excited CO2 are further discussed. All these elements are significant for understanding the requirements of RF-excited source.The model of passive components and the rule of PCB layout are demonstrated. Although in the same circuit, the characteristics of passive components are quite different when they are in a high frequency condition. So, we have to make an appropriate selection among all the components available.The experimental study on impedance characteristics of the laser at RF discharge excitation is also introduced here. Without this parameter, we can't carry out the design of RF-excited source.Finally, three different designs of RF-excited source based on the SYNRAD 48J-1 series RF laser have been introduced and exactly analyzed with relevant experiment results. All the designs are aided by ADS2003C, which is a Agilent's product for RF/MW simulation. The Phase Noise Analysis, Harmonic Balance, and Load-pull simulation skills are utilized during the design.According to the results of experiments on SYRAD 48J-1, there kinds of RF-excited source can work well. But considering many aspects, such as the volume, stability and safety, we should combine microstrip technology with the power oscillator in the design of RF-excited source.