| RF-discharge technology has been used in industry laser for several years, and it brings thoroughgoing improvement to beam quality, working stability and so on. It is meaningful to understand the RF-discharge mechanism.This thesis discusses this problem from these three angles:(1) The theory discussion of one-dimension transversal discharge model is got. The conclusion is obtained, such as transversal electron density distribution,the transversal electric field distribution, the gain distribution,RF-discharge breakdown theory and the property of plasma in the discharge zone. Furthermore, the property of plasma includes the characteristics of the plasma sheath and the impedance of the plasma.(2) The effect of excited frequency to the property of discharge is discussed in experimental research. It contains that the relation between breakdown voltage and excited frequency and the effect of exited frequency to the property of plasma in the discharge area. Furthermore, several rules for selecting the excited frequency from that are achieved.(3) The best scheme to choose the gas mixture and the atmospheric pressure are got by analyzing a great deal of data. The percentage of the decomposed CO2 is obtained by measuring the density of CO in the discharge area. Furthermore, the conclusion that gold cladding layer of the copper electrode and the decomposition of CO2 can be prevented by adding some CO.Through analyzing the characteristic of discharge and its effect factor, methods of selecting best exited frequency, gas mixture, gas-pressure are got. Meanwhile, the measures of preventing from CO2 decomposing are found. All of that can help to get laser parameter. . |
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