Deltav System In Semiconductor Factory Service System

Nowadays, Foundation Field bus technology becomes a hot spot of the automation industry. It approaches a more decent way. Among them, DeltaV system released by Emerson Management on 1996 is the most successfully bus system. Till now, this system is sold to many companies all over the world. However, when talking about the relatively sensitive and old-fashioned IC industry, whether or not a certain material or equipment can be accepted needs a very long term verification time frame. So far, the industry is still mainly using the old systems. Therefore, the best way to verify this DeltaV system is to build it up with a newly created Fab. This article is going to prove if this DeltaV system can meet the requirement of the semi-conductor industry by implement the system as the facility monitoring system. And prove it to be very powerful in this field.Currently, widely used industry control system includes the following: Stardom from Yokogawa, PKS from Honeywell, PCS7 from Siemens, Provox/RS3/DeltaV system from Emerson. PROVOX is widely used in those old semi-conductor facility FMCS systems. Facility system is the very core part of the semi-conductor company. The stability of the system directly impacts the life of the people working in it. It controls the usage of multiple dangerous chemical materials in the FAB. A very tiny mistake might lead to thousands of millions cost. Thus, to build up a stable and smart system is extremely important to the semi-conductor company. During the past several years, the main infrastructure of the facility system uses the Provox system. The shortcoming of the system is very obvious. Especially incompatible problems when integrated with other PLC systems, malfunctioning when short of upgradable version, high cost when spare parts is out of stock and the difficulty to do troubleshooting when problem occurs. To find a replacement for this is very important to the semi-conductor company. Based on this goal, we would like to discuss the possibility and advantage of replace the traditional Provox system by the DeltaV system by practical research of using it in my company's facility system. Plant Web from Emerson is the fourth generation of the DCS. The DeltaV provide a very good method to resolve the problem among the traditional Provox system.Firstly, this article analyzes the current industry status all over the world and the requirement of semi-conductor companies.Secondly, it talks about the background of the DeltaV system and its specialties. We compared it with several other industry control systems. Therefore the leadership of the control systems in this field is proved.After that, by researches over the implementation of the DeltaV system in the semi-conductor facility monitoring system and real implementation of network infrastructure and software/hardware deployment proved the advantages and adoptions of this foundation field bus based DCS system in the semi-conductor industry. Finally, this article describes the added modules including: Zero Mo function,Alarm call out function,PID Fuzzy-Auto tuning, Advanced Loop function. This contributes a lot to the revision of any future DCS system design of the semi-conductor industry.