Vlsi Test System The Realization Of The Dc Parameter Measurement Subsystem

IC Test System is an important component for national microelectronics industry. The Research and Design level of IC Test System is to a large extent influence the scale and effectiveness of the microelectronics industry, therefore countries in the world attach great importance to develop the test system with independent intellectual property rights.DC parameter measurement is an important method in the process of IC testing, is one of the key means to ensure the performance and quality of integrated circuit. IC DC parameter measurement technology is a supporting technology in the development of IC industry. With the development of integrated circuits, increasing scale, structure has become increasingly complex, the integrated circuits'DC parameter testing is also more and more important. This paper introduce the ultra large scale integrated circuits DC parameter measurement subsystem of the principles, implementation process and results accuracy.In this paper, SP-3160V VLSI test system as a platform, detailed analysis and research of the ultra large scale integrated circuit test system for DC parameter measurement subsystem's software, hardware, and software calibration method.The present paper describes the following four parts:First, the introduction for SP-3160V VLSI test system composition, and described the principles of the DC parameter measurement.Second, the narrative for DC parameter measurement subsystem hardware design in SP-3160V test system, introduced the characteristics of each device selected and the entire DC parameter measurement subsystem hardware structure.Third, outlined in the software implementation of DC parameters measurement subsystem, focusing on description of the software calibration algorithm.Fourth, Showing test results of SP-3160V DC parameter measurement subsystem, and a brief analysis and discussion of the direction of further improvement.