| On the basis of studying the principle of Reflectance differential spectroscopy(RDS), a test system for RDS was designed and developed to meet the need of the research of semiconductor film materials. During the development of the test system, the hardware components, functions and interface standard were studied, the popular virtual instrument development tool LabVIEW was adopted, and different control solutions were taken flexibly to fulfill the application control program based on different controlled objects and the overall application program scheme was presented in the process of integrating all the instruments and equipment. Especially the OCX control for the monochromator was called directly which guarantees the performance of the test system and shortens the time of development. Meanwhile, data processing, data acquisition, data storage functions of digital phase-locked are made good use of and communicated with the computer by means of the GP1B interface realizing the data display and storage. Besides, the rotating degree of the sample were controlled precisely by means of controlling the step motor which eliminated errors produced by rotating the sample by hand. Repeated measurements that were performed on some samples after the system was putted in good working order indicates that the test system is stable and reliable, flexible and effective, and has important practical significance and an good application prospect. |
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