Study On Of MEMS Devices Synthesis

With the development at full speed of the technology of microelectromechanical systems, because MEMS device has extensive application prospects in the national defence and civil field, MEMS studies and already becomes one of the key directions of development in Hi-Tech of developed country in the world. Our government pays much attention to on MEMS in recent years, under the joint efforts of subsidizing the government and the university , scientific research institution, MEMS device research work of our country has already made very great progress, but greater disparity still exists compared with foreign countries, it is also very backward that craft simulation and device CAD in MEMS device design respect. Especially on the structural design of MEMS device, because the blind imitation of foreign countries device, make us be unable to grasp the device and design and optimized method in an all-round way. Have hindered MEMS device of our country from developing the further improvement of competence.This text is from synthesised sizes of device and optimized method to start with, under the present and limited technological condition, put forward the concept of Canonical size to simplify designing, for setting up the MEMS device synthesis method of device and procedures. The realization of MEMS synthesis can shorten the design cycle of MEMS , realizes the fictitious design and manufacture of MEMS device, and MEMS Synthesis supreme goal is to realize the synthesis of MEMS system.The article has studied the digital logic in VLSI at first, do a leadership for MEMS synthesis research, the concept , course and method of MEMS Synthesis have carried on the concision and analysed the introduction, and then analyse and compare with the place that MEMS synthesizes the same and difference while synthesizing with the logic in VLSI. Analysed the foreign research current situation too.Put forward the concept of canonical size, reduced the design parameter, simplified the design process. This text has also studied the device which combs microresonator synthesis and utilized the Synthesis method of the effective area, getting the corresponding microresonator device architecture parameter, the device which has realized microresonator Synthesis. And has returned to prove , the error was very small in ANSYS software ,and accord with the designing requirement .The microaccelerometer of silicon is the most successful one in the device commercialization of MEMS, Provide the refering to silicon microaccelerometer device of the corresponding synthesize two kinds of optimization methods and procedure in the article.MEMS Synthesis is serve to MEMS design, MEMS synthesize is previous work that just for realizing MEMS design, which can have one's own standard cell library .In the article ,I Make one MEMS primary element Synthesis interface with software C++Builder. (include cantilever beam , clamp-clamp beam, membrane ). It is comprehensive to finish the basic geometry device parameter. Produce the topological parameter of the device automatically.The thesis has finished a new developing field- MEMS Synthesis introduction tentatively, and implementation method . Set up one device synthesis that reliance with Canonical size , and has drawn corresponding MEMS idea of designing storehouse of setting up with MEMS elementary cell device's synthesis interface. Lay the foundation for the realization of MEMS system synthesis.