The Design And Development Of EAP System On CIMS

This paper discussed the design and development of EAP system in CIMS project of semi-conductor manufacturing industry. The main function of EAP is monitoring and controlling the equipment of product line, it is necessary control system to realize auto-producing. Before the system design, requirement analysis has to be studied seriously, the architecture of EAP system is made up of three modules, those are EC(Equipment Control), ED(Equipment Driver) and Task flow. For the EAP system must face to outside system with the different protocol, so the system design to have two interfaces. EC realized the interface toward MES, AS, the communication protocol is RV; ED realized the interface toward equipment system, the protocol is SECS based on RS232. Adopting three-module architecture made the complicated system simple, and the function of each module is clear and easy to realize. At the same time, the interface of system is clear and definite, its software architecture is stronger to use.The major functions of EAP system are equipment mode control, equipment initialization, material tracking, equipment remote control, data collection, alarm management, equipment state management, recipe management and communication with MES, AS. The advantage of this system is it's strong adaptability, definite architecture and easy maintenance.