| In this thesis,the polymer/silica hybrid integration technology is analyzed and studied.VOAs with different structures are designed and fabricated by combining the advantages of organic and inorganic planar lightwave circuit devices.Combined with theoretical knowledge,the influence of each parameters on the performance of the device were studied.The process parameters of the device were confirmed by simulation software.Finally,the devices were fabricated and measured.The research background and the domestic and foreign research status of VOA are reviewed in detail.The important position of VOA in optical communication network is explained.The knowledge of mode analysis of PLC,the operating principle of MZI structure waveguide device and the performance parameters of wavelength division multiplexer with AWG structure are introduced.The VOA based on different technologies is analyzed,and the main performance indexes and applications of VOA are listed,which provides a theoretical basis for the device design in the following chapters.A hybrid integrated chip of polymer/silica wavelength division multiplexer and variable optical attenuator was designed,simulated and fabricated.5-channel AWG is chosen as the wavelength division multiplexer’s structure.The crosstalk of the prepared AWG is less than-13 d B in the bandwidth of 3 d B.The transmission loss is 1.4 d B/cm.The maximum attenuation of VOA in O-band is 23.65 d B.The rising and falling time are 180 μs and 184 μs individually.The integrated device of AWG and VOA produces the maximum attenuation at the voltage of 5.5V,and the power consumption is 23.49 m W.Among them,the second channel can produce 10.3 d B attenuation at the voltage of 5V,and the insertion loss is 31.68 d B.A polymer/silica hybrid integrated VOA array with MMI-MZI structure is designed,simulated and experimentally prepared.The coupling efficiency of the chip is improved by grinding and polishing.The attenuation of the VOA is obtained as 20.25 d B with an insertion loss of 16.21 d B when the modulation voltage is 6.6 V.The rising and falling time are 220 μs and 340 μs individually.A polymer/silica hybrid integrated VOA array with MMI-MZI structure is designed,simulated and experimentally prepared.The coupling efficiency of the chip is improved by grinding and polishing.The preparation process used in the previous work is optimized.The light transmittance of VOA is proved. |
