Study On Integrated Variable Optical Attenuator

As the demand for the optical communication capacity is making rapid progress, wavelength-division multiplexing is one of the best solutions to solve this problem. Variable optical attenuator is one of the key devices in wavelength-division multiplexing systems.This paper introduces the principal theory , process and test technology of variable optical attenuator. At first, this paper analysises the Y-junction and multi-mode interference structure of variable optical attenuator. We had fabricated the variable optical attenuator of MMI structure with ridge wave-guide structure and also studied the reactive iron etching of silicon. At last, we tested the variable optical attenuator and draw some conclusions.After testing, we can draw a conclusion that the technology parameter of the device is ideal. First, the device can transmit with single mode. Second, the insertion loss is low. Third, the attenuator range is big. At last, the device can work well in a large temperature range.