Design And Fabrication Of Organic/Inorganic Hybrid Integrated Microring Resonator

The research of this thesis is on the design and fabrication of organic/inorganic hybrid integrated microring resonators.It includes the study of the output characteristics of a single-ring micro-ring resonator.Using coupling mode theory,study the coupling between waveguides to get the coupling coefficients from the coupling region,so that the microring resonator can be simulated accurately.Through those simulation analysis,the microring resonators'parameters are derived,and the devices are fabricated and tested.In this paper,the microring resonance equation and microring transmission theory are introduced through basic theory of planar lightwave circuit technology.Firstly,the wave equation theory is introduced.The analytic solution of the planar waveguide is performed using the wave equation.The approximate solution of the rectangular waveguide is calculated.Next,microring transmission theory is introduced.The transmission equations for all-pass microring resonators,racetrack microring resonators,and parallel channel microring resonators are derived as the basic principles for device design in subsequent chapters.A tunable microring resonator was designed and prepared based on a silica-based structure.To meet the critical-coupling condition,a Mach–Zehnder interferometer(MZI)as the tunable coupler was integrated with a racetrack microring resonator.The extinction ratio of the fabricated device can be tuned between from 1.12 to 13.84 d B.A high Q factor of 4.47×10~6is obtained at an extinction ratio of 13.84 d B.The coupling condition tuning efficiency of the device is 3.956 pm/m W.The wavelength shift tuning efficiency is 4.136 pm/m W.A racetrack microring resonator with a bending radius of 120?m and a coupling length of 1765?m was proposed and characterized based on a hybrid polymer/silica waveguide structure.The FSR of the device was obtained as 0.351 nm with a Q factor of 8680.An extinction ratio of 16.83 d B was measured at the resonant wavelength of1544.629 nm.The energy efficiency of the device as a thermo-optic switch is 12.07pm/m W,with the rise and fall times of 174?s and 182?s,respectively.The racetrack microring resonator with a bending radius of 1400?m and a couplinglength of 1400?m was designed and fabricated based on the polymer/silica hybrid integrated waveguide inverted ridge-shaped structure.The Q factor of the device is20272 at the resonant wavelength of 1500.154 nm.