Research Of Terahertz On-chip Antennas Based On Silicon Techonology

With the development of low-cost silicon technology,terahertz system-on-chip(SOC)designed by silicon technology has become a research hotpot in the world.The terahertz on-chip antenna(OCA)can avoid the losses and uncertainties caused by package processes,and can improve the integration of the system,having a very high application value.However,due to the limitations of semiconductor technology,silicon-based terahertz on-chip antennas are typically limited in terms of radiation efficiency,gain and bandwidth to meet actual engineering requirements.Therefore,it is essential to design high-performance terahertz on-chip antennas.In this thesis,silicon-based terahertz on-chip antennas have been researched,and the main works include the following two aspects:1.Study on 120 GHz wideband on-chip dielectric resonator antenna(DRA).In order to improve the bandwidth of on-chip DRA,this thesis comprehensively analyzes the characteristics of silicon-based on-chip DRA and the methods of wideband DRA,and proposes a multi-mode rectangular DRA structure fed by planar slot and a design method of 120 GHz on-chip multi-mode DRA.Under the premise of the above research,the 120 GHz on-chip dual-mode and tri-mode DRAs are designed using 180 nm SiGe BiCMOS technology.The on-chip dual-mode and tri-mode DRAs achieve a relative bandwidth of 18.6% and 20.3%,with significant bandwidth advantages.Finally,based on the designed on-chip dual-mode DRA,on-chip 1×2 and 2×2 DRA arrays are designed,whose gains can respectively reach 7.2 d Bi and 8.5 d Bi.2.Study on 340 GHz high-efficiency microstrip patch antenna.Based on the structure of rectangular microstrip patch,the high-efficiency terahertz on-chip antenna is realized by loading a back cavity and covering a layer of quartz,using 180 nm SiGe BiCMOS technology.The quartz-covered microstrip patch with cavity backed has the peak gain of 5.3 d Bi with the peak radiation efficiency of 73%,with significant performance advantages.Under the premise of the above research,the on-chip 1×2 and 2×2 arrays are researched.In this part of work,the quartz-covered 1×2 and 2×2 arrays of microstrip patch with cavity backed are respectively achieved with 7.3/8.8 d Bi gain and 63/55%radiation efficiency according to the simulated results.