The Research Of Terahertz On-Chip Antennas And Systems Based On Silicon Technology

Silicon-based technologies are widely used in terahertz(THz)frequency band for their low-cost and superior integration capability.Fully integrated THz systems,which can elimi-nate the losses and uncertainties caused by package processes,are becoming a hot research topic.This thesis focuses on the study of the silicon-based on-chip antenna(OCA)and sys-tem-on-chip(SOC)for THz high-speed wireless communication.The content of this work is summarized as follows:1.A 340GHz substrate integrated waveguide(SIW)cavity backed OCA structure is proposed:In the proposed OCA structure is fed by coplanar waveguide(CPW),and rectan-gular slots are etched on the upper wall of the SIW cavity to form a rectangular patch radiator,3.7dBi gain and 48%radiation efficiency are achieved for the antenna unit according to the simulated and measured results.This antenna can be used in small-scale phased array systems for the simple structure and no post-process required.2.A 340GHz high-gain and high-efficiency 3D antenna is proposed:The proposed antenna includes an SIW cavity backed OCA,a low-permittivity supporter,and a high-permittivity dielectric resonator.lOdBi gain and 80%radiation efficiency are achieved according to the simulated and measured results.This antenna can be used in single channel receiver systems where high-gain and high-efficiency are required.3.A D-band dielectric loaded end-fire OCA structure is proposed:By co-designing the OCA and the reflecting plane in the assembly structure,and choosing a thinned thickness for the silicon substrate,end-fire radiation is achieved.And with a dielectric loading,high-gain and high radiation efficiency are achieved for the D-band end-fire OCA.In this part of work,end-fire OCA and 1×2 array are achieved with 4.1/7dBi gain and 83/72%radiation efficiency according to the simulated and measured results,respectively.This antenna has advantages in D-band single-and multi-chennel communicaton systems.4.A 320GHz reflector loaded end-fire antenna structure is proposed:Without thin-ning the substrate,a 320GHz end-fire antenna structure is realized by designing a reflector in the silicon substrate of dipole antenna using the etching/megnetron puttering process.The gains and radiation efficiencies of a 320GHz end-fire antenna and a 1 x2 array are 5.5/7.7dBi and 78/68%according to the simulated and measured results,respectively.This antenna is a good candidate for large scale THz array systems.5.A 320GHz 1×4 fully integrated phased array transmitter is designed and imple-mented using phase-shifting-multiplexing concept:The transmitter composes a phase-lock-loop(PLL)frequency synthesizer,quadrupler,analog attenuators,reflection-type phase shifters(RTPSs),power amplifiers(PAs),modulator/quadruplers and SIW cavity backed OCAs.The effective isotropic radiation power(EIRP)of the proposed transmitter is 7.6?10.6dBm at 310?330GHz frequency band.Beam scanning of × 12°is achieved in the H-plane through measurement.6.A scalable 135GHz transceiver(TRx)chipset is designed and implemented using the dielectric loaded end-fire OCA:The TRx integrates a transmitter and a receiver with end-fire OCAs.Measured EIRP of 9.2dBm and gain of 21 dB are achieved by the transmitter and receiver,respectively.The chip-to-chip wireless communication is also demonstrated us-ing 16QAM modulation scheme with the data-rate of 4Gb/s.