Machine Energy Management System Based On SECS/GEM Standard

In the production process of semiconductor materials,a variety of machine equipment for the production of various process tasks constitute a close and complex network of production equipment.Each machine equipment needs to consume a certain amount of energy resources to complete different production tasks.At present,some domestic enterprises are still in the form of manual meter reading to obtain energy consumption data,and the scientific and efficiency of energy management needs to be improved.Some new projects recognize the importance of energy management and begin to equip enterprises with specialized energy management systems,but most of them are aimed at the overall energy management of the entire plant.Statistical analysis of the energy consumption data required during the production process is currently not completed by a dedicated management system.Aiming at the problems in energy management in industrial production,this thesis takes a semiconductor enterprise machine control system project as the research background,and designs and implements a SECS/GEM standard based on a production machine in the semiconductor manufacturing industry.Machine energy management system.Through the practice work in the production workshop of a well-known semiconductor optoelectronic enterprise in China,I am familiar with the communication standards between the current production equipment and the host control computer in the global semiconductor industry,and the shortage of the current enterprise energy management system found in the work process.Based on the SECS/GEM standard,this thesis designs the communication format of the SECS/GEM protocol used in the system,and uses WinSECS,ADO.NET Entity Framework,Serilog,DevExpress and other frameworks for development.Microsoft SQL Server is used as the database management system.Data processing,real-time consumption statistics,historical energy consumption data query,machine control status and alarm information processing for the energy consumption of machine tools in a semiconductor enterprise factory.In the case of realizing basic functional requirements,various methods are adopted to ensure system data security and stability.Finally,the system test and analysis of the system designed and implemented in this thesis shows that the system runs stably and efficiently.The work of the thesis takes an application system as an example to digitize and automate the energy consumption data generated during the processing and production of the machine.The energy consumption system of the machine is researched,designed and realized.Designed and implemented a machine energy management system that is in line with the global semiconductor industry's general communication standards,practical and economical.The work of this thesis has certain reference significance and reference value for reducing the energy consumption of enterprises and improving the efficiency of energy consumption management.