Design And Implementation Of Semiconductor Back End SDT System Based On SECS/GEM Standard

Taking production line automation project of the domestic semiconductor back end manufacturing enterprise which the author finishes his thesis in as background,SDT system based on SECS/GEM standard is designed and implemented in order to meet requirements of the enterprise.Firstly,requirements analysis is conducted by the author.It’s also the guide which the overall design of SDT system follows.Overall architecture including hardware connection and software architecture,technical architecture,data architecture and deployment architecture are designed in detail.Secondly,research on scheduling problem of semiconductor back end production line which is multi-reentrant and complex is done by the author.Scheduling model is built,genetic algorithm is used to solve the model and the chosen algorithm is optimized.Optimized algorithm has good results in terms of convergence speed and optimal value.Gantt chart is generated by the two algorithms.What’s more,the author builds SECS/GEM communication model after analyzing different protocols included in SECS/GEM standard.Then he finishes designing and implementing the SECS/GEM communication module according to the model.In addition,database,data-interchange format and BinCode are designed to store and manage data generated in the system.Other modules of the system including files monitoring module,manual management module,network service module are also designed and implemented by the author and they work as expected.At last,testing of all modules is done and results show that all modules work well and they meet the demand of production.The SDT system designed and implemented by the author has come to use.Higher production efficiency and lower production cost makes it really helpful to raise the automation level of the enterprise.