Remote Monitoring And Control System For Semiconductor Production Based On Non SECS/GEM

This thesis is based on the production automation of a large domestic semiconductor backend packaging and testing enterprise as the background,in view of a large number of semiconductor production workshop equipment which does not support the SECS/GEM communication protocol,the design and implementation of a remote monitoring system for semiconductor manufacturing based on non SECS/GEM protocol.First of all,on the basis of the research and demand analysis of enterprise production,the overall design of the whole remote monitoring system is carried out.The overall structure of the whole system hardware connection,function modules and software is mainly designed.Based on that,the system's technology architecture and data storage are designed in detail.Secondly,the research and design of OCR image processing module is completed.The research content of the whole OCR image processing module mainly includes image preprocessing,image segmentation,feature extraction and character recognition.It mainly solves the recognition difficulties of touching characters and complex scenes from the screen of different devices.Thirdly,the client is designed and implemented,which is used to connect the Central control server and the machine system.The design of client,in addition to the OCR image processing module,also includes the module of the template library establishment,configuration and running.The template library establishment is to establish the character library for different types of equipment.Equipment configuration is to identify different screen and parameter name in the client.Running process is to receive and execute commands which are sent by Central control server,either reading commands or parameters executing commands.Finally,the sub module and database module of the whole remote monitoring system are designed in detail.First,the sub module of remote monitoring system is designed in detail,including the design of production process monitoring module,recipe management module,data acquisition module,alarm management module and network service module.Then the database module is designed to realize the storage and management of the remote monitoring system data.Semiconductor production remote monitoring system based on non SECS/GEM communication protocol is designed in this thesis,it has been used in semiconductor production,through the actual production test run,has made significant progress in improving production efficiency and reduce production cost,improve the level of automation of semiconductor enterprises in a certain extent.