Design Of The Motiom Control System And Active Suppression Of Terminal Residual Vibration For Parallel Manipulator With Limbs Of Embedding Structures

With the deepening of information technology,a high-speed and high-precision waferhandling robot has become the key technology of integrated circuit manufacturing equipment.In this paper,the proposed 3-DOF parallel manipulator with limbs of embedding structures,overcomes the shortcomings of traditional series-parallel structure of industrial transport robots,and adopt an open motion control technology,through the optimization of trajectory curve combined with input shaping to change system drive input signal,so as to achieve a rapid handling wafers between different stations and precise positioning.Firstly,with the PC as a host computer and motion control card constitute a masterslave control structure,and built the hardware platform of motion control system.Based on LabVIEW software platform to secondary open the motion control card,designed a graphical interactive interface,and by calling the DLL dynamic link library functions and LabVIEW mixed programming,ultimately,designed a highly reliable,fully functional,stable operation of the open-ended motion control system.Secondly,aiming at the problem of terminal residual vibration suppression of the 3-DOF parallel manipulator with limbs of embedding structures,an active suppression method based on the classical positive impulse input shaping combined with the optimal S-curve profile is proposed.Using the Lagrange method to build rigid-flexible coupling dynamics model for the parallel manipulator with limbs of embedding structures,which consists of the rigid rod and the flexible components,and then through the dynamic characteristic analysis,it is confirmed that what influence the residual vibration most is the low order modal.After that,resonant frequency and damping ratio are obtained through experimental analysis and simulation,and based on the residual attenuation vibration model of the linear second-order owed damping system that affected by impulse sequence,change the input signal of the drive through feedforward positive impulse input shape combined with the optimal S-curve profile,so as to achieve active suppression of the terminal residual vibration of the parallel manipulator with limbs of embedding structures.Finally,the experimental result shows that the chain nested residual vibration attenuation time of the end of the parallel robot is reduced by 57.14%,the maximum amplitude is reduced by 22%,the positional accuracy and trajectory precision are improved in the process of high speed and high precision wafer handling.Using "PC + motion control card" the open-ended motion control system to achieve the parallel manipulator with limbs of embedding structures between different processes at high speed,high precision and high repeat positioning accuracy of silicon wafer handling work,so as to achieve security and stability of the mass production requirements of silicon wafers.