Research On The Residual Vibration Of A Parallel Robot With Limbs Of Embedding Structure Based On Asymmetric Input

The increasing demand for electronic chips has led to the rapid development of related industries.The high-speed and high-precision wafer manipulator has become the key equipment to guarantee product performance and improve product quality.In this paper,a 3-DOF parallel manipulator with limbs of embedding structures is taken as the research object,and the related research on the residual vibration suppression based on asymmetric input is carried out.By using nested structure,the manipulator overcomes the shortcomings of traditional serial manipulator that working space is small.The embedded motion controller is adopted.By using asymmetric input curve to track every joint of manipulator,the residual vibration of manipulator is suppressed,and the manipulator's quick operation and precise location is achieved.Firstly,according to the requirement analysis of the actual processing scene and the hardware structure of the manipulator,the preliminary scheme of the manipulator's motion control system is determined.In the hardware aspect,the embedded motion controller is used as the main control device of the control system to build the hardware platform of the control system.In terms of software,the scheme takes MFC as the basic framework of WinCE platform,designs HMI for interaction between system users and control system,the embedded motion controller platform is developed by calling the dynamic link library provided by the motion controller's SDK.Secondly,the mathematical model of the asymmetric S curve is derived,and the key index of the mathematical model is analyzed.The asymmetric input of the joints of the manipulator is realized by combining the sampling value of the curve and the PVT mode of the controller.Then the asymmetric S curve is used as the joint input,and the experimental research on the residual vibration suppression of the manipulator is carried out.Finally,screening and statistical analysis of the vibration data collected by the acquisition equipment.The relationship between the input and the following error and the motion control precision of the manipulator in the deceleration stroke is analyzed by using the asymmetric S curve.The relation between the asymmetric coefficient R and the maximum residual amplitude and the residual vibration decay time of the manipulator is analyzed when the target displacement is short displacement and middle displacement,and the relationship between the asymmetry coefficient and the running smoothness of the manipulator is also analyzed when the target displacement is long displacement.