Research On Multi-axis Motion Control Card Of Wafer-handling Robot

Wafer-handling robot is a key equipment in Wafer manufacturing industry. It is responsible for transmission and location of semi-conductor among various wafer processes. As the increase of requirement and changes of wafers' sizes, the wafer-handling robot has to move rapidly and smoothly. Control system is a major part of the robot, and its performance directly impacts production efficiency and manufacturing quality.Based on research of various motion control ways, this paper provides a type of open-architecture motion control system. The card uses DSP+CPLD as the core components and designs a series of peripheral electric circuits. It can control three servo-motions at the same time.Firstly, this paper introduces the development and research situation of motion control system, analyzes their characteristics, and discusses the development trends.Secondly, introducing the structure and characteristic of the wafer-handling robot, based on analyze of servo-motions and controllers, this paper gives the structure of the overall framework, presenting details of the hardware controller. This card can connect to the industrial computer through the PCI bus or the SCI bus to complete a specific function, such as the position and speed of motor control based on the received instructions.Thirdly, this paper introduces the hole hardware circuit deign of the motion control card. The communication module includes PCI and SCI bus. The card can be inserted into the PCI slot of PC or be connected to the SCI connector using wires. On the motion control module, the paper proposes a program based on DSP+CPLD. The program has a good general-purpose. It can realize the position and speed motion control and deal with the coding response signals. This work also involves the overall schematic design and PCB board design.Finally, it analyses many types of trajectory planning and control strategies, and proposes time-jerk synthetic optimal trajectory planning and incremental PID control strategy. This paper presents the overall software structure of the motion control card.