Properties Of A Nanofiber MEMS Pressure Sensor

The main research of this paper is nanofibers MEMS pressure sensor based on MEMS.It has the characteristics of light quality and making simply and can be applied to industrial and living fields.It also has the very high research value.The selection of sensitive materials is very important in the process of making sensor.This paper uses PZT as the sensitive material,which has good piezoelectric properties.Making PZT nanofibers by the electrostatic spinning technique,and combining PET substrate with the ITO electrode to produce the flexible MEMS pressure sensor based on PZT nanofiber.Using the testing system to test the basic properties of sensor,and it can provide certain reference on the application of piezoelectric materials in MEMS pressure sensor.Firstly,designing the structure of nanofiber MEMS pressure sensor,which has four parts:piezoelectric nanofiber,substrate,electrode and pressure elastic film.The materials of four parts are PZT,PET,ITO and PDMS.Designing the whole process flow of the sensor and analyzing the working principle of the sensor.Secondly,making PZT nanofibers by electrostatic spinning technology,and the PZT nanofibers were characterized by XRD and SEM.The ITO electrode is produced by using the magnetron sputtering technique and etching technique on PET substrate.The pressure elastic thin film PDMS was produced,and the four parts were made into PZT nanofiber MEMS pressure sensors,and then welding the wire with the electrode to prepare for the later test.Finally,through the size and frequency of the constructed pressure sensing device testing of the influence on PZT nanofiber MEMS pressure sensor output open circuit voltage and carrying out the sensor's reliability test.