Technology Research And Manufacture Of Flexible Pressure Sensor

Flexible pressure sensor has the unique advantages of flexible bending,good tensile ductility,light weight and high efficiency,low cost,and large area preparation.Flexible pressure sensor is widely used in scientific research and industrial production in information,medical,energy and other fields,so it has important value for the performance research of flexible pressure sensor.This paper mainly studies the influence of manufacturing technology of flexible pressure sensor on its basic performance,tests the dynamic pressure magnitude response characteristics,dynamic pressure frequency response characteristics,sensitivity and stability of flexible pressure sensor.In this paper,lead zirconate titanate(PZT)with high piezoelectric constant,good stability,dielectric and certain elasticity is selected as the sensitive material to make the flexible pressure sensor,and then a test platform is built to test the basic performance of the pressure sensor,which provides a reference for further research and application of the flexible pressure sensor in the future.Firstly,the working principle of flexible pressure sensor is analyzed,and two kinds of flexible pressure sensors with electrode structure are designed,which are mainly composed of PZT piezoelectric nanofiber,pet substrate,ITO circular and parallel electrode and PDMS elastic film.Then,the manufacturing process of flexible pressure sensor is designed and improved.PZT nanofibers were prepared by electrospinning,and the spinning parameters were adjusted to improve the spinning technology.Two kinds of ITO electrodes,circular and parallel,were fabricated on pet substrate by magnetron sputtering and photoresist etching.PDMS films were fabricated by mixing silicone rubber and curing agent,and then were spin coated on pet substrate with PZT and ITO electrodes to make a flexible pressure sensor.Finally,the output voltage of the flexible pressure sensor under the dynamicpressure and dynamic pressure frequency is tested,and the output results are analyzed.The sensitivity and reliability of the two different flexible pressure sensors are compared.