Design And Technology Research Of MEMS Pressure Sensor Based On Graphene

MEMS(Micro-Electro-Mechanical System)sensor technology has been widely used in various types of sensors because of its small size,low cost,high reliability,easy integration,easy mass production,and easy to implement intelligence.At present,most of the sensors are based on silicon.The material of silicon itself determines that the sensor does not have flexible characteristics.After years of development,the research of silicon materials in the field of MEMS has already entered a bottleneck,and it is difficult to break through.Graphene is leading-edge and hot new semiconductor material in the scientific field.Compared with silicon,graphene has smaller size space and better electrical performance.The flexible deformation of the sensor can be achieved by structural design,which not only improves the performance of the sensor,but also has a wider application space.In this paper,a capacitive flexible graphene MEMS pressure sensor with two different interdigital electrodes was successfully fabricated by using simple experimental equipment and simple process.This thesis include:(1)Based on the structural characteristics of the interdigital electrodes,two different interdigitated structures are designed,which are parallel interdigitated electrode structures and circular interdigitated electrode structures.The PDMS flexible film is needed to wrap the interdigital electrodes of the graphene MEMS pressure sensor to make sensors flexible.(2)The size parameters of the interdigitated electrodes of the two structures are determined,including the side length,the finger width,the finger spacing of the interdigital electrodes,and the side length and thickness of the PDMS flexible film,the thickness of the graphene paper,and more.(3)The manufacturing process of graphene MEMS pressure sensor is studied.Through continuous improvement of process parameters and processing methods,the fabrication process of graphene MEMS pressure sensor suitable for this subj ect is found.A graphene MEMS pressure sensor with a sensitivity of 608 MPa has been obtained,which proves that the fabrication method is feasible.(4)The test system is designed by hand-held digital bridge and the test platform is built.The pressure is applied by the different combination of the self-made weight and the standard weight.The data is processed by the software to obtain the dimensions of the two different interdigitated structures.The static and dynamic test images of the graphene MEMS pressure sensor are fitted and analyzed for the image.By comparing the sensitivity and observing the dynamic phenomenon,the performance of the sensor in this subject and the change law before and after the pressure are obtained.Finally,the application demonstration experiment of the sensor is carried out by building the Arduino test platform.