Design And Research Of A Pressure Sensor Based On Multiferroic Nano-fiber

Design and research of a pressure sensor based on multiferroic nano-fiber, mainly use multiferroic nano-fibers as the sensitive material of sensor to prepare for a piezoelectric pressure sensor. The piezoelectric properties of multiferroic nano-fibers was made use of. This research mainly was divided into the following three aspects:1.Introduction and analysis of the pressure sensor, including the interpretation of structure and principle, the analysis of piezoelectric properties.2.The process of multiferroic nano fibers pressure sensor, mainly includes design of process flow, the sensor samples fabrication, the implementation of process and the research of process difficulty.3.The sample test of multiferroic nano-fibers pressure sensor, mainly includes the analysis and characterization of nano fiber and test preparation of sensor.Firstly, the multiferroic nano fibers pressure sensor consists of silicon substrate and the interdigitated electrode, multiferroic nanofibers. The measurement range of the sensor is0-20kPa. The working principle of the piezoelectric pressure sensor and series parallel circuit voltage amplification principle was introduced, and the parameter of structure size was design. The finite element software was used on stress analysis of square elastic composite film, and the design strength was verified. Single nanofiber piezoelectric properties was analyzed, and the effect of single nanometer fiber parameters, length and diameter included, and load on the output voltage was researched.Secondly, three kinds of process scheme were proposed and their process flow were designed. Compared with three kinds of process scheme, the existing problems of different schemes were analyzed, eventually scheme three was chosen as the process of multiferroic nano fiber pressure sensor. Meanwhile, the process flow nano fiber pressure sensor was introduced and the specific process parameters and process were given. Combined with MEMS technology and electrospinning technology, multiferroic nanofibers pressure sensor samples were made. The photos can be seen, and the sample quality is good, and the method is simple and feasible.Finally, the PZT and BFO nanofibers were characterized by XRD and SEM, and the ferroelectric hysteresis curve was analyzed, and nano fiber was proved to have a performance of ferroelectric properties. At the same time, the design of sealing test barrels were studied, and two seal barrels for testing pressure sensor were designed, and a scheme of the test barrels was completed. General parts for test system were selected and assembled into a test device of pressure sensor. Test deviceis were prepared as a tool for testing pressure sensor.