| A sensor is a device or device that can be measured and converted to an available output signal in accordance with a certain law.It is the first link to realize automatic detection and automatic control,and it is usually composed of a sensitive element and a conversion element.MEMS sensor research began in 1960 s,to represent the first silicon diaphragm pressure sensor and strain gauge from the Honeywell research center and the Baer laboratory.The pressure sensor is one of the most profound influence in the MEMS sensor,and its performance is determined by the measurement range,measurement accuracy,nonlinearity,repeatability and working temperature.With the continuous improvement of the degree of automation,the sensor requirements are constantly improve,must be developed with high sensitivity,high accuracy,fast response speed,good interchangeability of new sensors to ensure the reliability of the production automation.In order to ensure the reliability and stability of industrial production automation,a new type of sensor with high sensitivity,high accuracy,fast response and good compatibility is the main demand of the market in the future.Nowadays,the pressure sensor manufactured by MEMS technology has a great improvement in linearity and sensitivity.Considering the factors such as the IC manufacturing process and the temperature characteristics of components,the zero-point error,temperature drift and sensitivity error of pressure sensor Remaining,all need to rely on follow-up signal compensation technology.This paper mainly studies the MEMS pressure resistance type pressure sensor structure and circuit structure,the principle of sensor compensation,MEMS pressure resistance sensor compensation scheme,MEMS pressure resistance type pressure sensor testing system.A set of calibration system for piezoresistive pressure sensor and digital signal processing gain compensation system was designed.The DSP gain compensation part of the system uses the MLX90308 chip sensor output signal temperature and sensitivity compensation,while using the LabVIEW NI6211 data acquisition card lock acquisition sensor system after correction of the signal for data presentation and processing. |
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