Research On Key Technology For TO252 Turret Based Semiconductor Handler

Turret based semiconductor handler is a kind of semiconductor special equipment which can be used to carry out electrical performance detection,image detection,trademark printing,tapeing,and sorting for IC chips.It is significant to develop this equipment with independent intellectual property rights.Based on the T0252 handler,this paper has carried on the research to the machine from three key aspects:control technology,vacuum adsorption technology and communication technology.First of all,the overall design of the hander is introduced,including the composition of the station,functional requirements and performance indicators analysis,the main station structure,electrical system layout and motor selection and control.The control software of the machine is designed in detail.The architecture of the software,the total flow,the function class,the database module and the working interface are designed.The operation logic control method of the multi-worker threads is introduced.The running process of each worker thread is introduced,as well as the communication,synchronization and priority among them.Then,the kinetics of high-speed rotating vacuum nozzle sucking semiconductor chip is studied.The calculation formula of dynamic suction force is given.The dynamic suction force of the main motor S-shaped and trapezoidal acceleration and deceleration curves are compared and analyzed,and the relationship between them is revealed.The reference value of vacuum degree for the T0252 type chip is also given.The adsorption performance of the vacuum nozzle of the handler is studied by CFD numerical simulation method.The numerical simulation orthogonal experiment is carried out using different factors.The distribution of flow field of the nozzle is studied,and the influence of each factor on the adsorption performance is revealed.The optimal combination of the nozzle structure for the taet handler is also given.Finally,the international semiconductor industry communication standard—SECS communication protocol is used on the handler.The SECS communication module of the machine is designed in detail,including the communication flow,Socket communication and SECS message resolution processing.The remote production parameter collection,alarm information collection and remote control functions of the test handler is realized.Correctness of the communication is proved through the prototype test.Based on the above research,the production efficiency of the test handler is improved,the ratio of the batch carry-over is reduced,the trouble-free operation time is prolonged,the automation level is improved,and the whole machine performance is improved.