Semiconductor Automatic Control Software Development Under SECS

With the rapid development of semiconductor technology, the major semiconductorintegrated circuit manufacturers, as well as researchers have started to look for amanagement or monitoring techniques, advanced process control (APC) system concept,hoping the APC system functions can be more efficient with the precise reaction orcorrection semiconductor manufacturing exception, avoid unnecessary errors in a timelymanner to protect the product yield improvement.In this paper, the status of the semiconductor wafer fabrication and semiconductorphotolithography process research and analysis the PHOTO advanced process control(APC) system solutions. This work mainly in the following three aspects:(1) With the current status quo of manufacturing enterprises, and to conduct a detailedneeds and feasibility analysis. Exception handling system of the specific needs of theproduction line, the system is divided into multiple sub-modules detailed demandmodeling.(2) Under the production of semiconductor manufacturing background, designsoftware architecture for enterprise needs. Then according to the actual needs of theproduction process, as well as the concept of process feedback at different levels ofdemand modeling, system specific development features and functional requirements foreach levels(3) Design application example, the design of the various modules used in aproduction line system, the verification of the system simulation test, objective proof of thePHOTO APC system solutions can be implemented.In this paper, semiconductor wafer manufacturing industry as the background, designideas with the concrete implementation for the Construction of the Photo area APC system, hope can make use of semiconductor research and development of automation systems fordomestic given meager help.