Wireless Monitoring System Of AlN Crystal Growth By PVT

With the fast development of the Information Age,people have an increasing demand and put forward higher requests for semiconductor devices.And the emergence of the third generation of semiconductor materials provides unlimited possibilities for the production of new semiconductor devices.The Aluminum Nitride crystal(AlN),as a representative of the third generation of semiconductor,has so many excellent features,such as the wide and direct band gap,the good UV transmittance,the high heat conductivity,the high resistance rate,the small dielectric constant,the high breakdown voltage and the strong ability to resist radiation,that it is able to make photoelectric devices with good performance.At the same time,the Aluminum Nitride crystal has the similar lattice constant and the thermal expansion coefficient comparing to other III group nitride.It is the preferred substrate materials for epitaxial growth of the III nitride group,and it provides a theoretical solution to the lattice adaptation,thermal mismatch problem when proceed the epitaxial growth of Si substrate,sapphire substrate and Sic substrate.But the growth of AlN crystal is difficult,and at present,people are still using artificial monitoring mode to grow AlN crystal.It costs a lot of manpower and time.Therefore,it's necessary and important to design a wireless monitoring system of AlN crystal growth.This paper is based on the growth of Aluminum Nitride crystal by PVT method,explored the characteristic of AlN crystal and the technological parameters of the AlN crystal growth.On this paper,a wireless monitor system of the AlN crystal growth is designed on Arduino platform,based on the analysis and combination of aluminum nitride crystal growth technology and the traditional growth equipment.This paper put forward a designation of the wireless monitoring system mainly from three aspects: the programming of PVT process methods,the building of system's communication network structures and the concrete implementation of controlling.And make a prototype wireless monitor system to test its controlling function by send and receive of instructions,and its network function by workable communication between parts.The system has integration of the traditional industrial local control and remote computers'(or smartphones')wireless remote control.There are local and remote ways to monitor and control the whole process of AlN crystal growth on real-time.Each control unit of the system will be centralized connected by communication network,and be under the control of the wireless control and local control,so as be centralized manage by them.In theory,it can be effectively improved the operation security and efficiency of the AlN crystal growth.It also plays an important role for the experimental technical personnel to quickly handle the emergency,reduce unnecessary loss and improve quality of the crystal as much as possible.What's more,PVT technological parameters are able to be optimized by collecting relevant data in the process of crystal growth.In a word,this system has the characteristics of a simple structure,the full functions and strong extensibility,which has a good prospect of application and popularization in AlN production field.