Macro Micro Displacement Detection System Based On Labview

With the increasing research in precision stage in the world,it has great progress in measurement, driving and controlling technology, which develops to a direction of high precision, high speed and large stroke. measuring technique and equipment have a close relationship with the development of Ultra-precise locating platform drived by Macro micro and also bring along its fast development.Based on hardware of Capacitance decay displacement measuring instrument and Polytec Laser Doppler Vibrometer and software technique Labview,this essay established a set of Ultrasonic motor macro micro displacement detection system, which realized the measurement of stator vibration macro-micro displacement under the statement of operation of macro motor, so as to build a stable and reliable test system.The main researches are as follows:(1)This paper introduced the background and significance of Ultrasonic motor stator vibration macro micro displacement detection measurement and expounded the research status in macro to micro displacement detection at home and abroad and existing problems which illustrates the research emphasis and difficulty.(2)This paper established a set of stable and reliable macro micro displacement detection system hardware platform based on DWS micro displacement measuring instrument, laser vibration as the main hardware, and sensor, drive circuit, various components..(3)It took Labview as the main language to write the PC test procedures, to completed the design of the software debugging, and established a set of visual interface, so as to realize the running condition of the ultrasonic motor stator vibration of macro micro displacement measurement.(4)This paper had an analysis of test data processing, using the origin8.0, matlab2010 for measurement data, such as linear correlation detection operation, as well as verified the stability reliability of the experimental data.(5)Then,the program would generated in to executable file, which took easy for other ultrasonic motor. At the same time, it set up a stable and reliable detection system.(6)Measurement results prove that this system is more reliable by experiments. Based on the above result, this article have a summary and prospect on macro micro detection of ultrasonic motor.