| The workpiece table of the lithography machine is the motion mechanism in the motion control system of the lithography machine.The research object of this paper is the control of the workpiece table.The workpiece table is a macro-micro composite structure control system.The movable table is composed of a macro-moving table responsible for large-stroke movements,and a micro-moving table responsible for highprecision and high-response movements.After a reasonable selection of the workpiece table control method and macro-micro control strategy,an experimental simulation is conducted,and the results meet the target requirements.First introduced and analyzed the overall structure of the workpiece table,and then analyzed the specific composition of the macro table and the micro table,analyzed their characteristics and advantages and disadvantages and where they need to be complementary,and proposed the trajectory and needs of the workpiece table to complete The control accuracy achieved.Secondly,the motor control system of position loop speed loop current loop feedback is designed,and analysis and simulation verification are carried out for several specific macro-micro control strategies,including micro-motion following macromotion strategy and macro-motion following micro-motion strategy.And adopted macro-movement and micro-movement strategies for subsequent research The development and principle of fractional order PID are introduced,and then this controller is used in the position loop of the motor servo feedback system.For the selection of related parameters,the particle swarm optimization algorithm is selected to iteratively update the parameter simulation,and finally a set of ratios is adopted.Controller with better dynamic performance than PID control.Finally,in order to reduce the influence of the interference force,the linear expansion state observer is used to effectively suppress the disturbance and achieve a satisfactory result. |
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