Precision Motion Control And Implementation Of High-speed Macro-micro Composite Motion Stage

Microelectronics manufacturing equipment is constantly developing in the direction of high efficiency,high density and high performance,and it puts forward higher performance index requirements for its motion stage,which needs to have high-precision positioning performance while meeting high-speed,high-acceleration and large-stroke motion.The Inertial vibration is caused by the high-acceleration motion characteristics of the stage in the positioning process,which can not meet the positioning accuracy requirements in a short time and seriously affecting the rapid precision positioning performance of the stage,and affecting the operating efficiency of microelectronics manufacturing equipment.This paper aiming at the problem of rapid precision positioning of the high-speed,high-acceleration and large-stroke motion stage,a gain scheduling PID composite control method based on the combination of disturbance observer(DOB)and velocity-acceleration feedforward is proposed to achieve rapid attenuation of the residual vibration of the high-acceleration macro-motion stage.Meanwhile,a switching and positioning method of macro-micro motion stage is proposed,the switching moment and amount of action of macro-micro motion are clarified,and the rapid precision positioning of the stage is realized.Then,the experiment system of the stage is established,and the positioning experiment of the macro-micro motion stage is carried out to verify the effectiveness of the proposed method based on the implementation of related algorithms.The main research contents of this paper can be concluded as follows:1.In-depth investigation of the research status and requirements of high acceleration motion stage for microelectronics manufacturing equipment at home and abroad,the difficulties and key technologies of rapid and high-precision positioning of motion stage are clarified,and formulate the research methods and technical solutions of this paper.2.Based on the structural analysis of the high-speed macro-micro precision motion stage,through the macro-micro motion stage dynamics modeling analysis,thereduced-order mathematical model of the macro-motion stage and the electromechanical coupling model of the micro-motion stage are established.The system identification of the macro motion stage is carried out by using the sine sweep method,and the transfer function of the macro motion stage control system is obtained,which lays the foundation for the precision control of the high acceleration macro-motion stage.3.By aiming at the problems of long settling time and poor positioning accuracy caused by residual vibration in the high-speed macro-motion positioning process,a gain scheduling PID composite control method based on the combination of disturbance observer and velocity-acceleration feedforward is proposed.The effect of nonlinear friction on the stage positioning performance in the stage positioning process can be solved by gain scheduling PID control,the velocity-acceleration feedforward control method is proposed to ensure the high-speed and high-acceleration motion characteristics of the stage,The disturbance observer is used to effectively suppress the internal and external disturbances in the process of stage motion and positioning.The disturbance observer can effectively suppress the internal and external disturbance in the process of stage motion and positioning,and realize the high-precision positioning of the macro stage under the condition of high-speed motion.The simulation experiment analysis of the composite control method is carried out to verify the improvement effect of the proposed method on the positioning performance of the stage.4.By aiming at the switching method of macro-micro motion stage and the problem of positioning error compensation,a zero-velocity macro-micro motion switching method is proposed.That is,when the stage enters the positioning stage,the trajectory planning velocity is zero,start the micro-motion stage,and the amount of compensation action of the micro-motion positioning error is clearly defined based on the current elongation of piezoelectric of the micro-motion stage,and the effective compensation of the micro-motion stage positioning error is realized.Through the experiment of zero-velocity switching of micro-motion stage and positioning error compensation,the effectiveness of the proposed switching and compensation method for the rapid precision positioning performance improvement of the stage is verified.5.The algorithm proposed above is realized by programming,the control system ofmacro-micro motion stage is developed,the experiment system of macro-micro motion stage is established,and the experiment of rapid positioning of macro-motion and precision positioning of macro-micro composite stage are carried out to verify the effectiveness of the algorithm proposed in this paper for improving the positioning performance of the macro-micro motion stage.