Research For Extraction Technology Of Macro Model Of Micro-sensor

As sensing technology in the rapidly growing popularity of electronic products andelectronic products, the development of micro-electromechanical systems (MEMS) hasmade rapid development, MEMS products have entered the mainstream market. Thesensor based MEMS and electronic circuit coupling is bound to become close together.On the one hand, the micro-sensor and Application Specific Integrated Circuit (ASIC)integrated within the same chip has become the inevitable trend of development of thesensing MEMS; On the other hand, micro-sensor has entered the ranks of thedevelopment of low-power, low-cost, miniaturization, intelligentialization andintegration.At present, the design and simulation of micro-sensor technology, IC circuit designand manufacturing technology has developed quite mature, however, joining themicro-sensor design and IC circuit design, the development of extraction technology ofmicro-sensor macro model is lagging. Micro-sensors commonly are designed bymicro-sensors computer-aided design tools and verified by the finite element tool for itsfunction; however, the IC design is used EDA tools (such as Cadence Virtuoso designsoftware); But for extraction method for macro model of micro-sensor, traditionallyapproach is that the designers handmade Verilog-A model, and these models will beinserted into the IC circuit and implemented system-level simulation. These models areoften too simple, and non-parametric, in addition, these models are created not onlytime-consuming, laborious, and requires a combination of multi-disciplinaryknowledge.Market traction of the consumer electronics industry, micro-sensors are movingtowards more functionality, lower cost and faster time to market, the development oftraditional manual extraction method for macro model has encountered a bottleneck. Inview of this, this thesis presents a fast and convenient macro model extraction methodwith the help of software. Firstly, the micro-sensor system design methodology isdescribed. Secondly, the macro model design and simulation of micro-sensors isintroduced, and micro-sensor hardware language description is introduced too. Finally, micro-sensor package components and back-end processing circuit are common beinterpose in the Cadence Virtuoso Spectre design environment, and it is important forsystem-level simulation. It focuses on the extraction method for macro model of themicro-sensor, and take micro-acceleration sensor as an example showing the macromodel extraction method of micro-sensor, the macro model of the hardware languagedescription and encapsulating, and the macro model extraction lay the foundation forsystem-level simulation of controlling-processing circuit and macro model componentof micro-acceleration sensor.