Research Of The High-Speed/High-Precision Positioning System Of Macro/Micro Driving

With the application of high-speed/high-precision positioning system extending to IC/MIMS manufacturing, high speed precision machining and so on, there are great demand of the system performance with stroke, speed, acceleration and accuracy. High-speed/high-precision positioning system is needed to study deeply. Thereinto, IC manufacturing is a classic application, and it is a basic and strategic industry concerning national property and safety. Die bonding plays a key role in effecting the quality and efficiency of IC production. The rapid development brings a challenge to the system in utmost stroke, speed, acceleration and accuracy. Many new phenomena, rules and contradiction are emerged. So the research of high performance motion positioning theory and system design are in great demand.There is a great gap between our country's die bonding equipments and foreign advanced equipments. 85% packaging equipments rely on import. Advanced equipments importing are restricted due to the western developed countries'technology blockade policy. In this condition, the situation of"importing and falling behind generation by generation"is appeared. Therefore, the research of high speed and accuracy positioning system for die bonding is urgent.In this dissertation, on the basis of understanding for the latest domestic and overseas situation of high speed/high precision positioning system, macro-micro driving and cross-scale measurement method, a novel high speed/high precision positioning system is presented. The macro table, driven by VCM, achieves micrometer order positioning with long stroke and high speed and acceleration; the micro table, driven by PZT, achieves nanometer order positioning. The mechanism inertia was reduced by adopting a novel flexible gapless decoupling mechanism. The system uses the dual grating as close-loop position feedback. This paper carried out research in these areas: mechanism dynamic design, dynamic modeling, cross-scale measurement theory, macro/micro control strategies.Firstly, the flexible element stiffness model was built by using elastic...