High Speed And High Precision Macro-micro Double Drive Motion Platform Structure Optimization Design

The long range and high precision positioning technology is critical to the micro-electromechanical systems, ultra precision machining and precision measurement. In the chip packaging industry, high requirements for packaging equipment positioning accuracy, speed and acceleration was made with the improvement of production efficiency and chip pitch. Ultra-precision machining industry, the requires of equipment at the same time precision positioning capability but also long range was made due to the larger precision parts. Therefore, the study of large stoke, high-speed, high-acceleration, precision positioning platform has important theoretical and practical significance.The large stoke, high-speed, high-acceleration, precision positioning one-dimensional platform is completed based on macro-micro dual drive technology. The large stroke is achieved by linear motors, the macro move is measured by precise HEIDENHAIN grating, The high-precision positioning is achieved by piezoelectric actuators driven flexible hinge platform to compensate displacement error.Macro and micro dual-drive one-dimensional motion platform consists of five parts:linear motor, connecting frame, flexible hinge platform, grating, rail. When the macro and micro dual-drive platform with high speed, high acceleration repositioning, the macro moving platform more light quality produce smaller residual vibration.The material of flexible hinge platform and connecting frame is removed using a method of topology optimization design to achieve the target weight. The connecting frame sizes were optimized to get the best size and ensuring the connecting frame stiffness, stress and the natural frequency to meet the requirements.The flexible hinge mechanism of no gaps, no noise, no lubrication and high resolution are used to micro platform. The size parameters of meeting flexible hinge system stiffness and strength are made by MATLABcalculations. The micro platform of satisfy structural stiffness, strength and natural frequency requirements are made using topological optimization and size optimization of basing on the finite element software ANSYS. By using the finite element thermal analysis method, the mode of the structure coupling analysis of the macro-micro motion platform is established, and the connecting frame and the thermal characteristic of the connecting frame and the flexible hinge platform is analyzed. It is found that the deformation amount of the connecting frame and the flexible hinge increases at the field load condition with temperature by analyzing the coupling field. During optimizing the key component size of the connecting frame in the motion platform during the sensitivity analysis。The result from thermal structure coupling analysis and sensitivity optimization can make the motion platform more accurate and stable.Finally, the performance of macro-micro motion platform is tested using Analyzer AZ804-B tester. The speed track ability of macro motion platform, acceleration track ability of motion platform, speed track ability of micro motion platform and vibration amplitude of micro platform.