The Mask With Adjustable Aperture Taking The Hole Center As The Zoom Origin Applying To Microchannels

The radius of laser spot was usually zoomed down by optical microcopy system to realize precise machining in the scale of micron meters in microchannel-oriented laser micromachining system with mask device.The research of making thin film proves that the match of the diameter of laser spot and the width of the micro channel is important for improving surface roughness of micro channel and hydrophobic property.But In the process of laser micromachining, people usually replace mask with different radius to adjust the radius of laser spot. The problems of this process are :1)the change process of laser spot’s radius is not contiguous;2)the repetitive error of laser spot’s center point is very big, this is an obvious defect in laser micromachining, it makes people unable to process specific microchannel.With proprietary technology of making NOA61 thin film by using blowing gas and shining light on the same axis, this thesis has presented an idea of mask design, namely that designs and analysis of laser micro processing mask system whose mask with diameters in the micrometer level, scaling the origin at the center of the hole and adjusting the aperture automatically. This system can self-adjust the aperture by the algorithm input to the computer designed with the change of the micro channel, with hole center aiming at the center line of the micro channel everywhere, including the corner. The results showed that the tendency of design analysis and simulation are identical, which turns out that:1) The design plan is feasible; we can limit the ratio of shape error to the radius less than 5%.2) Translating and rotating components by using mature and sophisticated products, the mask system can be set up within the system motion errors. Reduced the error of the technical requirements and assembly processes, it will promote the development of microchannel for laser micromachining technology.