| Microfluidic chip is a new interdisciplinary frontier developing in the 1990s. Chemical analysis system has achieved miniaturization, integration and facilitation from sample treatment to detection on the whole by the intersection of various discipline fields such as Biology, medical science, material science, micro-electromechanical system (MEMS) and analytical chemistry. The development of the microfluidic chip technology not only makes a significant reduction in sample consumption and multiplies the analysis speed, but also greatly decreases the cost. Currently, microfluidic chip technology has been widely used in fields such as life study of science, pharmaceutical chemistry, food security, and medical science. With going deep into studying, the chip will be able to demonstrate its enormous development potential in more fields.In this paper, through using the Pyrex glass as material, the process conditions are optimized by the corresponding studying of Lithography technology, wet etching process and drilling process. The process simulation and functional simulation of microfluidic chips are carried out by the MEMS software. The major works include as follows:1. According to technology principles of microfluidic chips and corresponding practical requirements, the lithography mask and the cross-shaped micro-structure of microfluidic chips are designed.2. Adopting the wet etching methods to make the microfluidic chips which use the Pyrex7740 glass as the basic material, the undercutting in wet etching are studied.3. Using MEMS simulation software and optimization of processing conditions to complete microfluidic chip's technology simulation and functional simulation, we analyzed the simulation results.4. Adopting laser cutting and mechanical drilling to carry out glass cover-chip experiments, two experimental results are compared to optimize the selection of drilling. Through the above-mentioned studies, microfluidic chips have been successfully completed. |
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