Research Of Functional Microfluidic Chip Prepared By Femtosecond Laser

Microfluidic chip technology,which has received significant attention and research due to its significant advantages:high integration,small reagent consumption,high efficiency,environmental friendly,miniaturization,portability,low cost,and simple operation,has been hailed as one of the seven major technology that changed the world in the 21st century.Therefore,the design and processing of microfluidic chip is an important part of microfluidic chip technology,which attracts people's attention.The traditional microfluidic chip processing method is mainly based on the planarization process of MEMS technology,and obtain 2D microfluidic chip.But the 3D microfluidic chip has more high performance,and this method is difficult to implement the 3D microfluidic chip processing.Therefore,the processing of 3D microfluidic chip is more and more urgent to be solved.With the rapid development of laser technology,the pulse width is sharply reduced,and the peak power is greatly increased.This has enabled the femtosecond laser's advantages in micro and nano-processing to gradually emerge and occupy a place.The femtosecond laser two-photon polymerization processing method is widely used in the field of microfluidic chip processing because of its high spatial resolution,true three-dimensional processing,extremely low processing thermal effects,and a wide range of materials that can be processed.Compared with traditional microfluidic chip processing methods,femtosecond laser micro/nano processes do not require mask plates,and it is possible to integrate various 3D micro devices in a microfluidic chip in a flexible and controllable manner,giving the chip more excellent performance.In many applications of microfluidic chip,real-time measurement of flow rate is very important.In this paper,31)spring-like flow sensor is successfully integrated in microfluidic chip by using femtosecond laser two-photon polymerization.processing method,and compared with the existing flow sensor processing method,The characteristics of true three-dimensional processing and high spatial resolution of femtosecond laser two-photon polymerization processing method make the processing process more convenient and faster,and the feature size of the 3D spring structure can reach a few microns,increasing the sensitivity of the spring to the flow rate changes,realize the pl/min magnitude flow rate detection.In addition,the response of the spring-like flow sensor with different thickness to the flow rate is investigated.The spring-like flow sensor with different thickness can be used for the detection of different flow rates.The flow sensor can be real-time and accurate detection of the microchannel flow rate,and high detection sensitivity,and has broad application prospects in the microfluidic chip,biomedical detection and micro total analysis system and other research fields.At present,most of the biological and pharmacological studies are focused on the analysis of cell populations,and the average value of cell population characteristics is taken as the research result.However,there is heterogeneity among cells,and the experimental results based on a large number of cells ignore the influence of the differences between cells on the control of gene expression and cell behavior,and it is difficult to reflect the law of life activities at the single cell level,so it is very necessary to perform single cell analysis.For single cell analysis,a PDMS tunable microfluidic chip is proposed for single cell capture.The chip combines the passive capture mode of the microfluidic chip technology with the change of the bulk volume of the PDMS block using external mechanical forces in the tunability of the soft material to achieve chip tunability,which not only ensures the simplicity of operation,but also the activity of the cells which are captured.The chip is tunable,and the microfluidic chip can be used to capture particles of various sizes without redesigning the chip.The PDMS tunable Imicrofluidic chip successfully captures particles of different sizes in the unstretched state and in the stretched state,and realizes the yeast single capture,cultivates for a long time,the yeast successfully completes the budding division for many times,has proved its potential application value in the field of single cell analysis.