| With the Germany proposed "Industry 4.0" high-tech strategic plan, an intelligent manufacturing dominated the fourth industrial revolution broke out quietly. Among sources of error in the time grating displacement sensor, the thermal error is the important source of errors. Moreover, the higher the precision time grating displacement sensor, the greater the proportion of thermal error, thus reduce the thermal error to improve the measuring accuracy of time grating displacement sensor has the vital significance. Comprehensive research contents of domestic, thermal error analysis of time grating displacement sensor based on time grating displacement sensor measured angle expression, centered on the angular velocity of rotating magnetic field, interpolated pulse number, cycle of interpolated pulse signal.In the article the theory of time grating displacement sensor that was divided into signal generating section and signal processing section, is briefly described. By reference to the domestic literature, each sensor error source is analyzed in detail from signal generating section and signal processing section. Thermal errors of time grating displacement sensor are found out from errors. In the view of the analysis of time grating displacement sensor error sources, these errors are not only a wide range of sources, and that most of the quantitative analysis is more difficult. Analysis of thermal error sources is classified and analyzed on the basis of various error analysis, the actual evaluation method of time grating displacement sensor thermal error is obtained.It is theoretically proposed that temperature has a certain effect on time grating displacement sensor. Measurement experiment of time grating displacement sensor thermal error is conducted, the experiments is designed to measure the error of the time grating displacement sensor caused by temperature.The law of the impact to time grating displacement sensor precision caused by temperature is obtained. |
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