Reseach On Automatic Test System Of Uncooled Infrared Focal Detector Based On Vacumn Probe Station

In recent years, the Uncooled Infrared Focal Plane Detector is very popular for the superior performance. The performance requirements of the Uncooled Infrared Focal Plane Detector have been rising due to the increasing application in various fields. Under the stimulus of demand, its performance has experienced countless enhance and improvement from birth to now. At the same time, low cost has always been required in the research of the detector, thus the package cost of detector must be taken into consideration as well. Therefore, chip selection has become a research hotspot.This paper was exactly based on this hotspot. Firstly, the test technology development of Uncooled Infrared Focal Plane Detector was summarized and compared between homes and abroad, and then the research trends were analyzed and predicted. Also, this article puts forward a new design of automatic test system of infrared detector which based on vacuum probe station. Experiments showed that the parameters of the chip could be acquired through the automatic test system, and the response rate of the chip could be tested under high vacuum condition.The main research work of this paper includes the design of hardware test circuit, the design of vacuum probe card and the automatic control of testing system. The hardware test circuit provided drive voltage and time excitation for the chip test, and acquired and processed the voltage response signal of the pixel. At the same time, data acquisition part has designed single ended to differential circuit, which can eliminate common-mode noise and enhance drive ability of the analog voltage signal. The design of vacuum probe card. This paper has designed different testing card for different detector chip. At the same time, the generating circuit of bias voltage was integrated in the probe card. The bias voltage can be directly added to the chip through probe, to avoid the interference by transmission. The automatic control of testing system. The design was based on VC++ development platform, through the RS232 protocol to control the vacuum probe station and test circuit module based on FPGA, and used Matlab to complete the processing and analysis of test data. The test system can complete the chip select test of 320×240 and 384×288 series chip.The automatic test system has realized the automatic test of Uncooled Infrared Focal Plane Detector wafer and chip, with the correlation parameter such as response rate and noise, we can evaluate the overall performance of Uncooled Infrared Focal Plane Detector, the test results will display on a test report and wafermap. The test results were an important basis for chip selection and further research of infrared detectors. The automatic test system reduced the test time and package cost of infrared detector greatly.