Research On High-precision Motion Platform For Probe Station

Integrated circuit (Integrated Circuit, IC) is the core of the development ofelectronic information industry, and the IC manufacturing equipment is the basis of ICindustry. In recent years, the rapid development of IC industry, put forward higherrequest to improve R&D and manufacturing process of IC manufacturing equipment.Automatic probe station is mainly used for the characteristics or defects on wafer testing,when connected with the test instrument, can automatically complete the measurementof electric parameters testing and function on chip integrated circuit and integratedcircuit wafer. Probe station of high speed, high precision and can effectively improvethe production efficiency and ensure the accuracy of test results.Based on comprehensive analysis of research development of automatic probestation at home and abroad, combining the enterprise existing technology, structure ofautomatic probe station for a new design of. First, working principle and process of theprobe station is introduced in detail, and then according to the current performance ofprobe station market, puts forward the design target function requires and mainparameter of probe station.According to the function and main parameters of the design requirements, eachpart of the probe station for the functional analysis, design criterion is proposed; inorder to choose the appropriate drive mode, and the compact layout, ensure the stabilityand safety of all the mechanical parts and the whole system. On the basis of the hostpart: x-y platform, z platform, the panel assembly, mechanism design and3D modeling.The constituent elements of the servo system is analyzed,establish themathematical model and complete the model of the entire AC servo system.Afterdetermining the parameters, use simulink simulation software to verify the correctnessof the model.In the prototype platform, x, y axis positioning error is analyzed, using grating toform a closed-loop control, measuring the axis error by laser, the segmentedcompensation, the positioning error of x, y axis to meet the design requirements, fullyable to meet the probe station. Finally, the performance of the whole automatic probestation to do a comprehensive test, experiment proved that the prototype meets the design requirements.