| The scanning surface topography measurement instrument with advantages of largemeasuring range, the high precision, the high reliability, and the comprehensive measurementon surface profile and topography plays an important role in surface topography measurement.The software system is an important part of surface topography measurement instrument, isthe control center of equipment, and influence function and performance of instrument. Thispaper developed a software system for m surface topography measurement, analysis andevaluation.The overall design of the wide range of stylus scanning surface topographymeasurement software system is first described. The system uses three layer architectures,including the functions of instrument driver control and data acquisition, feature analysisand parameter evaluation module, etc.Two, three-dimensional surface morphology filtering technique based on polynomialfitting, spline filter, Gauss filter etc have been researched and implemented. The splinewavelet theory, algorithm and software implementation have been discussed. Thealgorithm for drawing of3D surface topography height map, theory of3D viewoperation, surface points pick-up based on DirectX has been presented.The calculation methods of surface morphology and regional parameters based on thestandard of ISO and ASME have been reached. Using standard software and data to verify theaccuracy of algorithm and the software implementation.According to the analysis of surface structure and evaluation, a transform based on FiniteRadon evaluation algorithm of MEMS structure analysis have been put forward thealgorithm can effectively extract MEMS structural characteristics, which provide the basis forMEMS surface topography parameter evaluation. The structural characteristics ofMEMS series of evaluation parameters have been provided. The MEMS structurecharacteristic parameter evaluation algorithm based on finite Radon transform and liftingwavelet has been provided, which has been verified by simulation and experiment.The stylus scanning surface topography measurement instrument software system hasbeen developed, using in the measurement on2D contour and3D profile, analysis andevaluation of the experiment, and has been compared with the Taylor Hobson PGI-830instrument to verify the reliability and accuracy of the instrument software system. |
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