Support And Drive System For Stylus Scanning Surface Topography Measuring Instrument With Large Range

Stylus surface topography measuring instrument is the most basic of all surfacetopography measuring instrument measuring instrument. The instrument supporting anddriving part will determine the performance of the entire instrument directly. Ever-improvingprocess quality of surfaces demands high Precision and velocity of surface roughnessmeasurement. Need to design the support and drive system for stylus scanning surfacetopography measuring instrument with large range.The paper processes the structural design of stylus scanning surface morphologymeasuring instrument with large travel. The linear scanning in X adopts rectangular slideguide, drove by DC servo motor and ball screw, which to ensure the guide smoothnesseffectively. The closed-loop control based on the grating feedback device is introduced to thecontrol system. In order to reduce installation errors, one-piece design is adopted in guide railsection which is made by GCR15. PTFE is cooperated with it. In Z direction the instrument isdriven by AC servo motor and ball screw, which can get greater torque output. As the sametime, the selection of important parts is analyzed and the static stress analysis.The closed-loop control mode of the instrument employs the PC with motion controlcard. Instrument control software based on Visual Studio2010.Dual-frequency laser interferometer is used to test the equipment mechanical properties.The test items include table positioning accuracy, straightness and perpendicularity.