A Research On Software System Of Vertical Scanning White Light Interferometry Measurement Of Surface Topography

The surface topography of the component directly affects the performance, life and reliability of the component, which are the important characteristic of the component's quality. With the development of manufacturing technology, the surface measurement accuracy is being improved. White Light Interferometry is an ideal measurement method because of its non-contact, wide range and high accuracy. White Light Interferometry is particularly suitable for measuring the three-dimensional precision surface topography, such as MEMS and micro optical structure which are not continuous surfaces. This thesis systemically studied the core algorithms and software system based on the vertical scanning white light interference profilometer.A topography recovery algorithm which combines extreme value algorithm with phase shift algorithm is proposed based on the analyzation of existed white light interference topography recovery algorithm. The combined algorithm takes the advantages of both algorithms, the efficiency and precision of the measurement system are also improved.A three-dimensional topography restoration algorithm is proposed based on the quality matrix of measurement process. By analyzing the failure mechanism of the recovery algorithm, establish the evaluation model of the interference quality based on the analysis of the interference signal, to determine whether the recovery algorithm is failure on each point, and then get the quality matrix of interference. The matrix is applied to the surface topography of recovery results to modify the three-dimensional surface topography.Design and develop a software system for white light interferometer profilometer based on the Visual Studio 2010 development platform. Multi-thread synchronization control technology is applied in the software system, to achieve the efficient time-multiplexing of the vertical scanning. This software system could choose different scheme depend on different characteristics of surface, and get standardized evaluation of the three-dimensional topography.The testing experiment is provided to verify the performance of the system, and good experiment results are obtained.