Study On Surface Topography Measurement System Based On GPU

Based on the National Natural Science Foundation of China (No.50835008) and the important national science & technology specific projects (No.2009ZX 04014-026), surface topography measurement and surface topography evaluation and the application of Graphics Processing Unit (GPU) are studied.In chapter one:The importance and background of surface topography measurement are expounded. Introduced the development and current situation of surface topography measurement and evaluation, expounded the development of scientific computing by using GPU. Finally, the study background and overall frame of the dissertation are given.In chapter two:White-light spectral scanning interferometry has been proposed. Several phase calculation algorithms are introduced. Through the comparative analysis, choose peak counting algorithm and Fourier transform analysis algorithm for Interference image processing algorithms.In chapter three:The data processing of surface topography measurement is discussed. First of all, the design of GPU parallel algorithm based Compute Unified Device Architecture (CUDA) is discussed. Secondly, analyzed preprocessing methods of signal, then realize parallel algorithm of peak counting and Fourier transform analysis by using GPU. The processing speed and the precision of these two parallel algorithms are analyzed. Finally, through the experiences, the Fourier transform analysis algorithm is determined as the phase calculation algorithm in surface topography measurement based on GPU.In chapter four:The establish method of three-dimensional Gaussian filter datum is studied, use GPU to processing two-dimensional Gaussian filtering procedure, and then propose the parallel processing method of evaluation of three-dimensional surface roughness. At last, standard surface roughness comparison specimens are measured and the results are analyzed.In chapter five:Based on the theory study, a surface topography measurement system is developed by using CUDA. The system control circuit and software module structure are designed, and the development of whole system is realized, and evaluated the surface roughness.In chapter six:The main content of the dissertation research is summarized, and the prospects of surface topography measurement based on GPU are presented.