Analysis On Reconstruction Of Stylus Probe For Micro And Nano Surface Measurement

Three-dimension measurement of part surface is important to obtain the characteristics of surface topography .It is also the basis of recording ,comparing and duplicating the surface feature that has been significantly and wide applied in mechanical vision, automatic process, controlling the quality of product ,biology and so on . However there is a problem in contacting measurement and scanning probe measurement . The measured image dilation is due to the conjugated approximation of stylus probe and the measured sample. Therefor the stylus tip reconstruction is very important for reducing dilation for improve of the measured profile in micro and nano surface roughness measurement.The thesis introduces the method– tracing razor blade to reconstruct stylus in micro roughness measurement and the method–blind reconstruction to reconstruction probe in nano roughness ; analyze the effect of probe's shape to the measured result through simulating the image; through using the method of blind reconstruction to deal with the simulated image , analyze the advantages and disadvantages of blind reconstruction; in this research a a stylus tip reconstruction method (STRM) was introduced which is derived from image convolution of micro and nano surface roughness measurement and to compare the effects of tip profiles based on tracing razor blade of ISO5436-1(GB/T19067.1) and blind reconstruction in draft standard of National Institute of Standards and Technology (NIST, USA) separately with micro and nano scale standard gages by experiments. Experimental results show that tip reconstruction with STRM are close to results obtained by measuring a razor blade in micro surface roughness and also to results obtained by blind reconstruction of stylus tips suggested by NIST draft standard in. Future works focus on developing 3D metrology in study of probe reconstruction to promote the precision.