Stylus Sensor System Based On Phase Grating Interference Principle

Surface topography is an important geometrical feature of a workpiece that influencesits quality and functions. With the development of manufacturing technology, the needs forsurface topography precision measurement and analysis with wide range is urgent. Awide-range, high-precision and high-resolution stylus sensor system based on phase gratinginterference principle is established; and its error characteristics are analyzed and a methodto decrease the non-linear error is proposed, which is of innovation and practical meaning.The research work is summarized as follows:Firstly, the principle of phase grating interference is analyzed, and A wide-range,high-precision and high-resolution stylus sensor system based on it is designed,Secondly, the stylus sensor based on phase grating interference principle is designed,which consists of mechanical subsystem, optical subsystem and signal processingsubsystem.Thirdly, the dedicated data acquisition card based on PCI bus is developed for thesensor output signal collection and counting, the data exchange between computer and thestylus sensor system.Fourthly, the originations of the non-linear error of the system are analyzed; and adynamical compensation model has been established to decrease it. The computational andexperimental testings are conducted, which prove the effectiveness of the compensationmethod.Finally, the phase grating interference stylus sensor system is constructed. Testingexperiments and error analysis are accomplished.