Dynamical Analysis And Testing Of High Acceleration Motion Stage Of Macro-Micro Driving

With the rapid development of micro-electronics industry, electronic packaging equipment makes high demands of long stroke, high acceleration and positioning precision of the motion systems. High-performance packaging equipment will achieve the motion with high acceleration(10-15g) and high precision positioning (1-3μm). High-performance precision motion stage which is the core component of electronic packaging equipment will directly affect the performance and competitiveness of our micro-electronic manufacturing equipment and electronic products. According to the demand of high acceleration and high precision of electronic packaging equipment, high acceleration macro-micro motion stage is researched in this paper. On the basis of overseas and domestic research status, overall design of single-axis macro-micro motion stage is conducted and developed. The performance of the macro-micro motion stage is verified by analyzing the static and dynamic characteristics of the motion stage, establishing dynamic models, analyzing vibration attenuation and conducting experiments. The main contents of this paper are elaborated as follows:1. The overseas and domestic research status of high speed precision motion stage is investigated in depth. Key technical issues and existing difficult problems of precision motion stage are analyzed. According to the investigation and analysis, the research contents and research focus are determined.2. Overall design of single-axis macro-micro motion stage is implemented. A novel driving method in which Voice Coil Actuator achieve macro motion and piezoelectric actuator achieve micro motion is put forward. The method of dual grating scales is proposed in position detection. The incremental grating scale are utilized in macro motion while absolute grating scale is used in micro motion to realize high precision positioning of the macro-micro motion stage. On the basis of overall design, the prototye motion stage and integrated control system are developed.3. The static and dynamic characteristics of the macro-micro motion stage are analyzed in order to obtain the deformation of the macro stage, natural frequency and vibration modes using finite element analysis method.4. The dynamic models of macro motion stage and micro motion stage are established respectively. Response regularities are analyzed under different input signals using MATLAB Simulink. In addition, the vibration attenuation of macro-micro motion stage is researched. The effect of vibration reduction based on piezoelectric actuator and the starting time when piezoelectric actuator is activated to reduce vibration are simulated.5. The prototype stage is developed and the motion characteristics and precision of the stage are measured using laser interferometer. The experimental results show that the macro-micro motion stage can achieve the motion with high acceleration and high precision.