Micro-manufacturing Platform Vibration Isolation Control Theory And Applied Research

This thesis is supported by the National Natural and Science Foundation. The number of the fund isNo.50075078. This Project name is "Basic technique research and Vibration Isolation Theory with bionic mechanism for devices of high precision". This thesis is mainly in two aspects: theoretical analysis and experimental research. It is composed of the characteristic of power transmission based on the SMR model, control theory of vibration isolation for Micro-manufacturing platform.MEMS technology is a newly fast developing area in the last 20 years. It is high-tech interdisciplinary and covers micro-mechanics, micro-electronics, micro-optics, fluid mechnanics, automatic control, physics, chemistry, viology, and material science, etc. And it has been attracting much attention around the world. Usually the dimension of this system is only several microns, even just some nanometers. And it is usally composed of optical, mechanical and electronic parts. Therefor, the demands for manufacturing such MEMS devices are very critical. Druing the manufacturing or masruing such devices, we need a very stable working platform,that is, making a deeper research on the basic technology and control theory of vibration and isolation for the platform.After reading many related papers, this thesis firstly presents an analysis method of power transmission and does some simulations. The results of the simulations show that the the analysis method of power transmission can reduce the complexity when designing the platform structure and guarantee a good vibration isolation capability of the micro-manufatcuring platform. Meanwhile, the research also shows that a system with the active control combined with passive control is better than those systems with only active or passive control.Synthesizing the results of the research of power transmission of SMR model, the vibration isolation mechanism and the structure of a woodpecker's head and bionic mechanism, we desgn the Micro-Manufacturing platform. Then we establish its mathematical models and dynamic equations.The author uses MATLAB to simulate control algorithms for vibration isolation and compares the differences of no-control, passive control and active control. The experiment resultes show that active vibration isolation control is better than other methods at the low frequencies. And the resultes are very close to the theorerical analysis.