Design And Application Of Micro Vibration Dynamic Air Floating Vibration Isolation Platform In Precision Laboratory

With the rapid development and acceleration of modernization of economy,precision instruments and precision machining are essential conditions for the development of advanced technology in China.Chip manufacturing is a big weakness for China's manufacturing industry.Chip manufacturing requires high precision for ultra precision manufacturing,However,China is still vulnerable in this area.Many factors affect the accuracy of processing,Among them,the micro vibration of the environment is one of the most important factors.In this paper,Jinan University underground lithography Laboratory for the background of the project,after careful survey of the laboratory site,the laboratory environment vibration around the targeted test,according to the laboratory micro vibration allowable standard,through the air floating platform for the laboratory lithography equipment to reduce vibration isolation design,so that its vibration level to the normal working level,namely VC-E(3?m/s).In this paper,the reasonable design scheme of micro vibration air floating platform for precision laboratory is put forward based on engineering examples,and the rationality of air floating platform is verified by field test(1)This paper summarizes some of the problems related to the effects of environmental vibrations in precision laboratories and precision equipment,taking into account both domestic and international literature,and carries out scientific research on environmental vibration through precise and effective research methods,reduction of vibration and precise equipment to reduce noise.(2)In this paper,we discuss the possibility of environmental vibration evaluation in China and overseas,and evaluate its feasibility.The principle of the vibration proof platform was introduced.(3)Through the combination of field test and ANSYS numerical simulation,the rationality of the design of the air bearing platform is studied.The field test data is used as the vibration input source,and ANSYS analysis is used as the method to study the inherent characteristics and vibration reduction effect of the air floating platform.The reasonable design of the air floating platform is realized by combining the test and analysis.(4)Through the study of equipment vibration isolation extended to the study of building vibration isolation method,and provides a precision laboratory vibration isolation method,and then further use ANSYS finite element analysis software to analyze the factors affecting the vibration isolation efficiency of the air bearing vibration isolation platform.It is found that the number of air springs,the spacing between springs and the size of the air bearing platform have an impact on the vibration isolation effect of the air floating platform.Increasing the number of springs can improve the vibration reduction effect of the air floating platform.Increasing the thickness of the table and increasing the spacing between the springs have little effect on the vibration reduction effect.