Software Development For Design And Simulation Of Vibration Isolation Systems Of Precision Positioning Stages

Precision positioning stage is widely used in IC manufacturing equipment. As an indispensable part of precision positioning stage, vibration isolation system provides super quiescent environment protection for running smoothly of platform. Therefore the design of vibration system become the key part in the design of precision positioning stage. As the running accuracy of precision positioning stage enhances unceasingly to the nanometer level, support of professional simulation analysis software tool becomes the key to design of vibration isolation system. Since the lack of vibration system modeling and simulation analysis software at present. software was developed for vibration system design and simulation of precision positioning stage. The main work in this thesis is as follows:Through analyzing on design process of vibration isolation system of precision positioning stage, found that there were three key issues in modeling of vibration isolation system, namely unified modeling, high precision and high efficiency. In addition, the design instance management of vibration isolation system based on file is cumbersome, poor user interactivity. According to these two problems, this thesis puts forward two major function requirements of software, namely the template library and instance pool; And then designed the software architecture and data structure.For template library functional requirements of the software, dynamic characteristics of components in vibration isolation system were analyzed at first, then dynamics model of components are set up on MWorks which is an various fields and unified modeling platform based on the Modelica language, and the dynamic characteristic parameters are extracted. After that the components' dynamics model are encapsulated to template and added to the template library of vibration isolation system. Based on the template library users can rapidly building vibration system model at the same time can ensure the high precision of dynamics modeling. For instance pool functional requirements of the software, through research of design cases of vibration isolation system, proved what the design cases contain, and instance pool was designed for unified management of cases. The retrieval method of design case is studied, therefore users can reuse history case conveniently.After completing the research above, software for design and simulation of vibration isolation system was developed based on C++ Builder. According to particular design requirements of vibration system, an vibration system was modeled, simulated and analyzed finally. The analysis results show that the vibration system model can meet the design requirements, which verifies the functions of software.