Font Size: a A A

Vibration Study And Test For High Speed And High Precision Macro-Micro Motion Stage In Electronic Manufacturing

Posted on:2016-08-04Degree:MasterType:Thesis
Country:ChinaCandidate:T S HuangFull Text:PDF
GTID:2308330461955865Subject:Mechanical and electrical engineering
Abstract/Summary:PDF Full Text Request
With the rapid development of electronic manufacturing industry, electronic packaging equipment put forward more and more stringent requirements for it’s core motion platform and system, demanding high speed and high acceleration movement under the condition of micron level precision positioning. This paper focused on the development of high speed and precision motion platform for electronic manufacturing, according to the demand of high speed and high precision. A single-axis macro-micro motion stage and integrated control system is implemented through dynamic modeling and vibration reduction. The experimental tests are performed to verify the performance of the platform. The main research contents are summarized as follows:1. The overseas and domestic research status of high speed precision motion stage is investigated in depth. The existing difficult problems of precision motion stage development are analyzed. According to the investigation and analysis, the research contents and research focus are determined.2. A macro micro compound drive scheme is proposed, the macro motion is based on the voice coil motor and the micro motion is based on PZT. The combination of the motions is realized to active the high speed and precision positioning requirements. A method of double grating scale is used to provide the position of the macro-micro motion. The macro motion is positioned through the incremental grating scale and the micro motion is determined by the absolute grating scale.3. The integrated control system is developed for the macro micro motion platform, which is used to collect and send the signals for the motor, PZT, the incremental grating ruler and the absolute type grating ruler.4. A dynamic model of the macro micro motion platform is created through the simulation tool of MATLAB Simulink to analysis the motion platform. The vibration of the high-speed macro micro motion platform is analysed. An active vibration isolation method is used and tested based on PZT driver.5. A macro micro motion platform is set up to carry out the experiment of the macro micro motion platform proposed, based on the development of the movement characteristics of integrated control system of the platform and its accuracy analysis test.
Keywords/Search Tags:High Acceleration, Macro-micro Motion Stage, IntegrationControl System, Dynamic Model, Vibration Reduction
PDF Full Text Request
Related items