Study On The Fabrication And Characteristics Of Visible Vertical-Cavity Surface-Emitting Lasers

Visible vertical-cavity surface-emitting lasers has lots of advantages, such as ease of integration, able to achieve high-speed modulation and low power consumption. So it is widely used in laser printing, light shows and many other areas.Conventional VCSEL has the weaknesses of poor thermal performance and non-uniform current injection. The new type of VCSEL can enhance the thermal performance and solve the problem of non-uniform current injection:First, conventional VCSEL is generally a ring etched hole structure, this structure makes the thermal performance of the VCSEL poor, we have designed a new type of bridge-type etched hole, which can enhance the thermal performance; When the aperture of the VCSEL is large, it will be non-uniform current injection, we have designed a new type of aperture, then we make the electrode on the aperture, which can make the current injection uniform.We have designed and prepared a photolithographic plate and we have successfully prepared670nm VCSEL through experiments. Then we use ANSYS to simulate the thermal performance of the VCSEL. We use MATLAB to simulate the optical performance of the new VCSEL. We research and analyze its characteristic combined with the experiment. The result is consistent with the design.